Multi-Scale Monte Carlo Simulation of Soft Errors Using PHITS-HyENEXSS Code System

We have proposed a multi-scale Monte Carlo simulation method of neutron induced soft errors by linking a particle transport code PHITS and a 3-D TCAD simulator HyENEXSS. An interface tool between PHITS and HyENEXSS is developed to generate the mesh structure optimized for an event where multiple secondary ions extending to arbitrary directions are generated simultaneously by neutron incidence on device. Using the interface tool, we have made it possible to perform the Monte Carlo calculation of soft error rates (SERs) based on event-by-event device simulation. The PHITS-HyENEXSS code system has been successfully applied to SER analyses for 65 nm, 45 nm, and 32 nm technology MOSFETs.