Electromigration investigations of aluminum alloy interconnects

Electrical measurements of test structures of Al-0.5%Cu interconnects were performed as a function of temperature and current density. We have examined 1.8 /spl mu/m wide/spl times/0.85 /spl mu/m thick/spl times/250 /spl mu/m long straight structures and found an activation energy, E/sub a/=0.95 eV and a current exponent, n=2.63, after correction for Joule heating.