A multi-project MEMS lecture and laboratory course

This paper will describe a senior/graduate level, elective, lecture and laboratory course Microelectromechanical Systems (MEMs). The course was designed for students in RIT's microelectronic engineering program. Therefore, the students had a basic understanding of most processing technologies. The lecture focused on physical fundamentals of mechanical structures and MEMs specific process technology. The laboratory part of the program included device design, process design, maskmaking, processing and testing of a multi-project chip.