Microfabrication activities at the University of Louisville

This paper describes the new microfabrication effort presently underway at the University of Louisville. A 1500 square foot class 100/1000 cleanroom facility was completed in the 1997 Spring semester. The cleanroom contains a wide spectrum of microfabrication processing and test equipment. The new lab supports a broad range of interdisciplinary research projects and will be utilized in the upcoming 1997 Fall semester for a new NSF-sponsored undergraduate course in microfabrication. Details of the cleanroom and ongoing fabrication activities at the University of Louisville are presented.