RuO/sub 2/ powder preparation and electrical properties in thick film resistors

The powder properties of RuO/sub 2/ varied with preparation conditions (kind of washing agent, amount of washing agent and calcination temperature). The electrical properties of RuO/sub 2/ powder thick film resistors (TFRs) were studied. The specific surface area and the resistivity and TCR of TFRs varied greatly with different washing agents. The crystallite size and specific surface area variation with calcination temperature show different characteristics to washing conditions. The resistivity of TFRs decreases and TCR becomes more positive with decreasing crystallite size. TFRs having conductive powder of higher specific surface area at the same crystallite size show lower resistivity and higher TCR values.