Manufacturing integration of data collection and statistical process control systems

Internal microprocessors are used in modern etchers to control wafer handling, lot and wafer logistics, processing, process control, and maintenance functions. In addition, external systems have been developed to provide additional monitoring and control capabilities. This paper addresses the automation of an etch area that includes polysilicon, oxide, and metal etching. Software packages that will be discussed are: 1) a family of diagnostic and planned maintenance (PM) tools that interface with the etchers and perform real time statistical process control, 2) the cell controller which is used to download recipes and recipe information to the etchers, and 3) network integration software. Solutions to networking and integration challenges were critical to the successful implementation. A description of the software tools and the integration into the manufacturing environment is presented. Techniques for problem identification and troubleshooting, and prevention are also discussed.