Scaleable process control based on SEMI standards and object-oriented technology

This paper presents the strategies and a design for a scaleable process control system. The strategies include the use of standards, the use of object-oriented design and the use of commercial software packages. The object-oriented design of the process control system took two perspectives: the application and implementation. The layered partition of classes based on these perspectives allows easier change and adaptation of new applications. The system is installed in the laboratory in the Center of Board Assembly Research (CBAR) at Georgia Institute of Technology. The system has gone through several changes since initial implementation. The effort required in change has been minimal.