On-Wafer S-Parameter Measurements in the 325–508 GHz Band

We report on two-port on-wafer vector network analyzer measurements in the 325-508 GHz frequency band. Measurements are made with prototype GGB Industries Inc. WR2.2 (325-500 GHz) coplanar waveguide probes and OML Inc. WR2.2 frequency extenders. New probe performance data and characteristics of probe tip calibration using a Thru-Reflect-Line procedure are discussed. Probe S-parameter measurements indicate insertion loss per probe of 5.0 to 9.1 dB in the WR2.2 band. Calibrated dynamic range of about 30 dB or better for insertion and return loss measurement across the band is achieved. These new results for the prototype WR2.2 probes, the calibration procedure, observed errors, and results of on-wafer amplifier measurements are presented.