Fabrication and surface functionalization of single TiO2 nanotubes devices for bio-chemical sensors applications

A single TiO
₂
nanotube device has been successfully fabricated using both FIB deposition technique and conventional Si process. The device shows linear I-V characteristics implying ohmic contact. The device shows conductance modulation when it is functionalized by lysine and GABA. Surface modification is confirmed by monitoring the resistance change of TiO
₂
nanotube. In this study, fabrication of single TiO
₂
nanotube devices and the effect on conductance of the nanotube devices by surface modification will be discussed for bio-chemcial sensor applications.