Tip integration on arrays of silicon micro cantilevers with self exciting piezoelectric sensor for parallel atomic force microscopy applications

Self sharpening tips have been integrated on arrays of cantilevers provided with self exciting piezoelectric sensors (ZnO) by using monocrystalline silicon micromachining. Atomic force microscopy (AFM) images of grids with periods of 0.25 /spl mu/m, 1 /spl mu/m and 5 /spl mu/m and with height differences of 100 nm, 15 nm and 180 nm respectively have been achieved with single cantilevers.