Experiments and analysis for micro-nozzle/diffuser flow and micro valveless pumps

Conventional nozzle/diffuser flow with different Reynolds number ranges was analyzed. The static model of valveless pumps was proposed. The relationship between nozzle/diffuser flow coefficients and the performance of valveless pumps was simulated. For experiments, the silicon nozzle/diffuser elements with conical angles of 5/spl deg/, 7.5/spl deg/ and 10/spl deg/ and the silicon micro valveless pump wafer were fabricated. The experimental results were discussed and conclusions made.