A 192×108 pixel ToF-3D image sensor with single-tap concentric-gate demodulation pixels in 0.13 µm technology

A single-tap concentric photogate pixel of 28 µm pitch is developed for application to time-of-flight (ToF) three dimension (3D) image sensors. The 198×108 ToF pixel array exhibits demodulation contrast higher than 50% and distance error less than 1%, over 1 to 7 m range using 20MHz modulation of 850 nm light emitting diode (LED) illumination.