3D modeling of active pixel sensor with microlens

Three dimensional modeling of active pixel sensor with microlens is reported by using an advanced drift-diffusion simulator together with finite difference time domain method for optical effect in this work. The opto-electronic responses are presented versus various power intensity and illumination wavelength. The aperture size of the isolated metal layer is also discussed. Whereas microlens is shown to improve the sensitivity, the aperture size of the isolated metal layer should be optimized to avoid sensitivity loss. The presented results demonstrate a methodological and technical capability for 3D modeling optimization of complex CMOS image sensor.