Mechanical properties of laterally driven microresonance with a one-side straight-leg suspension

The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.