Green function via moment matching for rapid and accurate substrate parasitics evaluation

Recently the substrate coupling and substrate parasitics are calling for more and more research efforts. This paper addresses this problem by formulating the multilayer substrate Green function equivalent to purely lossy transmission line circuits. Infinite number of exact images can be tracked by wave-tracing. Moment matching technique is used to approximate the fast decaying part while the slow decaying part is extracted by the wave-tracing. We achieve highly accurate yet closed-form space-domain Green function. Parasitics for our MCM on-wafer inductors due to substrate coupling can be efficiently extracted.