Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming

This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated.