High-speed electret charging using vacuum UV photoionization [Reprint]

In this letter, we propose a high-speed charging method using vacuum ultraviolet (vuv) irradiation, which can increase the charging rate by two orders of magnitudes than corona/soft-x-ray charging methods. So far, vuv has been used for neutralization of electrostatic charge in semiconductor process. However, the large ion current obtained with the VUV irradiation has never been used for charging electrets.