Fully Room-Temperature-Fabricated Low-Voltage Operating Pentacene-Based Organic Field-Effect Transistors With HfON Gate Insulator

Low-voltage operating pentacene-based organic field-effect transistors (OFETs) with a HfON gate insulator have been fabricated with a fully room-temperature process. Despite its thin capacitance equivalent thickness of 3.3 nm, the room-temperature-processed HfON gate insulator shows a low leakage current density of 7 × 10
^-7
A/cm
²
at a gate voltage of -2 V. Moreover, the fully room-temperature-fabricated OFET (channel
W
/
L
= 1650/100 μm) shows a low subthreshold swing of 0.12 V/decade, a large on/off-current ratio of 6.8 × 10
⁴
, a threshold voltage of -0.5 V, and a hole mobility of 0.25 cm
²
/V·s at an operating voltage of -2 V.