Some analytical problems of high performance flexure hinge and micro-motion stage design

Flexure hinge is a simple and ingenious mechanical structure. Being made of a monolithic material, cut so that there is a thin flexible part, it possesses many outstanding properties which ordinary hinge does not have, and can satisfy the demands for high accuracy and stability measurement and movement. So it is very important to study deeply some problems of flexure hinge and micro-motion stage design. In the article, the basic functions and structure properties of flexure hinge are introduced first. Due to the difficulty of theoretical calculation, the main design parameters of flexure hinge are provided by using SAP, a FEA program. On the basis of above research, the static and dynamic performances of micro-motion stage of flexure hinge are analyzed separately, and the relationship curves between the stiffness and structure parameters are provided for designer. Finally, the effect of machining error is discussed, and the relationship between the machining errors and movement accuracy is given.