A fully-integrated cantilever-based DNA detection SoC in a CMOS Bio-MEMS process

A highly-integrated DNA detection SoC, which includes DNA sensors, readout circuit, MCU, and OOK TX/RX, is implemented in a 0.35μm CMOS Bio-MEMS process. For low DNA concentration, an oscillator-based self-calibrated readout circuit with high sensitivity (2kHz/Ω) is proposed to convert small resistance variation of the piezoresistive cantilever sensor into adequate frequency shift. The measured results reveal that it could detect <;0.02% of resistance variation (0.6Ω) and cover detection concentration range of specific DNA from 100pM to 1μM.