On-chip RF inductors with magnetic nano particles medium

This paper presents on-chip planar inductors fully filled with magnetic-nano-particles-medium (MNPM) for compact and high-performance RF IC applications. In the prototype design, planar inductors have been constructed by using a filling process using nickel-ion permalloy (Ni
₈₀
Fe
₁₇
Mo
₃
) of sub-100nm in diameter to increase the inductance while maintaining the magnetic performance for high-frequency circuitry. Preliminary results of stripline sample show more than 100% enhancement in inductance (L) with quality factor (Q) of about 20 up to 8GHz, which is very promising for RF ICs.