MEMS silicon-based resistojet micro-thruster for attitude control of nano-satellites

This paper presents a miniaturized resistojet thruster device with an integrated thin-film heater, capable of delivering thrusts in the micronewton-millinewton range. Its small size (25 mm × 5 mm × 1 mm), low mass (162 mg), low power and propellant consumption make it very attractive for attitude control of nano-satellites (mass 1-10 kg). Based on the pressure measurements with the fabricated devices, thrust is calculated to be in the 20 μN - 1 mN range, depending on the propellant flow rate. By heating the propellant flow to 350 °C, thrust was increased, resulting in a 30% reduction in propellant consumption.