Inductively coupled wirebonded microcoils for wireless on-chip NMR

We report for the first time single-chip MEMS-integration of a resonant LC-circuit for wireless magic angle coil spinning (MACS) NMR. The chip consists of a wirebonded 3D microcoil, an interdigitated capacitor and a sample container. The LC-circuit resonates at 700MHz for
¹
H spectroscopy in 16.4T magnetic field. The microcoil is inductively coupled with the probe-coil of the spectrometer. We prove the high sensitivity of the setup by detecting the NMR signal from 0.3nl H
₂
O in a mixture with deuterium oxide (0.1% H
₂
O: 99.9% D
₂
O) with an SNR=8.5 in one scan.