Flexible force sensor measuring change in capacitance due to dielectric oil displacement out of domed polymer into surrounding channels

We propose a flexible capacitive force sensor not having vulnerable electrode on force applied site. It has a polymer domed structure inside which silicone oil is contained. When the force is added, the oil is pushed into surrounding thin channels, where the change in capacitance due to flowed-in dielectric oil is measured between two electrodes on top and bottom surfaces of channel. Since the channel is not directly applied external force, the electrodes do not suffer from damage problems. The change in capacitance was simulated using simplified flow model. The first trial device of sensing element was fabricated. The sensitivity of 0.05 pF/gf was achieved.