Design of T-shape vector hydrophone based on MEMS

This paper reports the design and fabrication of T-shape vector hydrophone based on MEMS inspired by fish lateral line. Based on the analysis of mechanical properties of T-beam, the design and fabrication process of microstructure are described in detail, and then the characteristics of the microstructure are analyzed by the ANSYS. The first-order resonance frequency is 1970Hz, and the position of the piezoresistor is away from edges about 120μm. The microstructure is manufactured by means of the silicon-on-insulator (SOI) craft. The test results show that hydrophone's receiving sensitivity is up to -180dB (0dB = 1V/μPa), displaying a clear directivity pattern in the form of “8” shape.