A micromachined high-Q X-band resonator

The authors present a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.