A new finite-element solution for parameter extraction of multilayer and multiconductor interconnects

In this letter, the geometry-independent measured equation of invariance is adopted with the finite-element method for mesh truncation and is successfully used in parameter extraction of interconnects. The major advantage is overcoming the tedious closed-form Green's function deduction and disagreeable Sommerfeld integral calculation for multilayer and multiconductor structures. Moreover, the high-order finite-element is employed to increase the accuracy and save computer resources. Furthermore, an optimizing numerical scheme, which is found to be very efficient, is developed to solve finite-element equations.