Wafer Level Reliability application to manufacturing of high performance microprocessor

Wafer Level Reliability (WLR) application has been demonstrated in semiconductor industry during the past several years. These applications address various issues related to process technology and yield enhancements, early reliability detection, and marketing. In this work, we describe the application of WLR to the manufacturing of high performance Alpha microprocessor including designing of proper test structures that represent products and database structures for statistical analysis using appropriate business models for the successful implementation.