Flexural-plate-wave actuators based on PZT thin film

The fabrication and the characterization of a microfabricated acoustic Lamb wave device driven by a piezoelectric PZT (modified lead zirconate titanate) Pb(Zr/sub x/,Ti/sub 1-x/O/sub 3/) sol-gel thin film for use in mass transport, mass filtering and fluid delivery systems are presented. Ultrasonic Flexural-Plate-Waves (FPW) at frequencies in the MHz order, are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDT) patterned on a 0.75 /spl mu/m thick piezoelectric ceramic PZT film which provides high acoustic power for physical translation of fluid and microparticles.