Structure and grain-size distribution of TiO/sub 2//SiO/sub 2/ thin film

The structure and crystal grain size distribution along the thickness of TiO/sub 2//SiO/sub 2/ thin films prepared by the sol-gel process under various heat treatment temperatures were studied. The X-ray diffraction spectra demonstrate that the crystallization temperature of anatase is 660/spl deg/C for 50TiO/sub 2//50SiO/sub 2/ thin-films. At 900/spl deg/C tridymite-M and rutile structures appeared. The anatase-rutile transformation temperature is 950/spl deg/C. DTA curves show that the structural transformation of TiO/sub 2/ is a gradual process. X-ray glancing incidence analysis indicates that the crystal grain size decreases along the thickness of the thin-film. With increasing heat treatment temperature, the difference of crystal grain size along the thickness is enhanced.