Improve fab performance by using a unique system that support overall equipment efficiency methodology

In advanced semiconductor manufacturing, capital equipment drives the largest cost in producing products. The best way to increase productivity capabilities while using the same existing capacity (number of tools) is by maximizing the tools' utilization or availability and minimizing the running loss. Indeed, sometimes the tools are not fully utilized. So why invest in more expensive capital equipment when you may be able to get the extra capacity benefits that you need by improving equipment performance?