Development of a Micro-mechanical Logic Inverter for Low Frequency MEMS Sensor Interfacing

This paper presents the development of a micro mechanical inverter for signal processing applications in low frequency MEMS sensors. The inverter consists of two MEMS contact switches connected in complementary configuration. The working principle of the inverter has been thoroughly explained and the design and performance analysis of the inverter have been systematically worked out using a top-down approach. PolyMUMPs surface micro machining process has been utilized for implementing and fabricating the MEMS inverter. The mechanical response and the switching response of the cantilevers have been extensively investigated. Static functional characterization of the inverter has been successfully carried out.