Statistical study of the effect of process variations on nano-scale CMOS circuits with scaling

In this paper, we study the effect of the variation of process parameters on the performance of a voltage controlled oscillator (VCO) and an inverter with technology scaling. The spread in performances is shown to be Gaussian in nature, considering the fact that the distributions of process parameters are also Gaussian in nature. The spreads in performances increase with technology scaling. These have been verified through HPSICE simulation results.