Design of a SAW-based sensor combined with a micro-hotplate for biological applications

A SAW-based sensor for chemical and biological application is designed in this paper. An Aluminum nitride piezoelectric layer is used over a bulk micromachined silicon substrate, so the design is compatible with CMOS Process. An additional micro-hotplate is integrated on system for thermal adjustment of sensing layer on required temperature and thermal stabilization of whole sensor. The SAW device with a working frequency of 610 MHz is built over a 21µm membrane. The frequency response and sensing property of the sensor are achieved via finite element analysis. The temperature distribution of the micro-hotplate is demonstrated.