KNN/BNT composite lead-free films for high-frequency ultrasonic transducer applications

Lead-free K
_0.5
Na
_0.5
NbO
₃
/Bi
_0.5
Na
_0.5
TiO
₃
(KNN/ BNT) films have been fabricated by a composite sol-gel technique. Crystalline KNN fine powder was dispersed in the BNT precursor solution to form a composite slurry which was then spin-coated onto a platinum-buffered Si substrate. Repeated layering and vacuum infiltration were applied to produce 5-μm-thick dense composite film. By optimizing the sintering temperature, the films exhibited good dielectric and ferroelectric properties comparable to PZT films. A 193-MHz high-frequency ultrasonic transducer fabricated from this composite film showed a -6-dB bandwidth of approximately 34%. A tungsten wire phantom was imaged to demonstrate the capability of the transducer.