Measurements and analysis of neutron-reaction-induced charges in a silicon surface region

We directly measured neutron-reaction-induced charges in the silicon surface region using silicon-on-insulator (SOI) test structures. Because the neutron beam used has an energy spectrum similar to that of sea-level atmospheric neutrons, our charge collection data correspond to those induced by cosmic ray neutrons. Measured charge collection spectra were dependent on the SOI thickness and agreed with simulated results. An application for the neutron-induced upset rate prediction was also discussed. Furthermore, the charge collection components were separated by our charge collection simulator.