Two Multiport De-Embedding Methods for Accurate On-Wafer Characterization of 60-GHz Differential Amplifiers

Two algorithms for distributed open-short (OS) and open-short-load de-embedding of multiport on-wafer S -parameter measurements are presented, and used for the characterization of four-port differential amplifiers operating in the 60-GHz band. For both methods, comparison to industry standard OS de-embedding shows that anomalies in extracted test-structure parasitics are now avoided, which in particular improves the characterization of the differential input and output impedances.