Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film

Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr
_0.52
, Ti
_0.48
)O
₃
(PZT) thin film on epitaxial γ-Al
₂
O
₃
/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO
₃
(111)/Pt(111)/ γ-Al
₂
O
₃
(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF
₂
gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.