Research of MEMS piezoresistive pressure sensor

A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on.