Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124
$\mu\hbox{m}$
out of plane and 34
$\mu\hbox{m}$
in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
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[2010-0201]