Application of integral equations to the simulation of diffraction grating based on chirped mirror

A method of integral equations (IE) is applied to a simulation of diffraction efficiency (DE) of metal-dielectric and all-dielectric diffraction gratings (DG). Two factors narrowing the spectral band of laser pulse reflection into minus first space harmonics (MFSH) are analyzed. It is found that by using a chirped mirror instead of a multilayer all-dielectric one for non-Littrow mounted DG it is possible to achieve the DE over 95% in 90 nm wide spectral window.