Design and fabrication of a MEMS scanning mirror with and without comb offset

The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated properly without significant differences. These fabricated devices all offer optical scanning angles of >20° and can be integrated in a laser scanning projection (LSP) module for pico-projector applications.