High-resolution PEA charge distribution measurement system

The pulsed electroacoustic (PEA) method is widely known to be an excellent method for measuring the space charge distribution that accumulates in thick dielectric materials (1 to 5 mm). We have refined the PEA measurement system for use on thin dielectric materials. With FFT deconvolution to compensate for the frequency characteristics of the piezoelectric sensor, the resolution in the depth direction is improved to /spl sim/3 /spl mu/m. This improved system is thus expected to be useful for the quantitative and nondestructive measurement of the space charge distribution in dielectric films.