RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets

Piezoelectric lead-zirconate-titanate (PZT) thin films of the morphotropic composition, suitable for microelectromechanical applications, are fabricated by means of RF-magnetron sputtering using a composite target, followed by an in situ annealing treatment. Increasing the thickness prevents the film from severe crack formation during the annealing process. Remnant polarization, coercive field, and relative dielectric constant of the films are 9.7 /spl mu//cm/sup 2/ 170 kV/cm and 930, respectively. The piezoelectric constant d/sub 31/ is estimated to be -49 pC/N. A practical microvalve application for volumetric gas flow measurement using the piezoelectric actuators is briefly described.