Fabrication of miniaturized thick-film arms for thermoelectric microgenerators

In the paper fabrication process of miniaturized thick-film arms for metal-based thermoelectric microgenerator is presented. Ones arms were fabricated using special photoimaginable ink and photolithography processing. Second arms were screen-printed using standard ink, then laser shaped. In the result process of fabrication narrow paths for microgenerator was elaborated.