Integrated active sensors for chip-level near-field scanning

Integrated active sensors for near-field scanning of printed circuit boards (PCB) as well as large scale integrated (LSI) circuits are presented in this paper. A miniature square loop and a miniature dipole are designed and monolithically integrated with two wideband differential amplifiers with a gain of about 28 dB and 22 dB respectively and a bandwidth of about 10 GHz. On-wafer measurement results of the integrated active sensors are presented.