Fully Integrated High-Isolation Low-Loss Digitally Controlled MEMS Filters

In this paper, the design and packaging of fully integrated digitally controlled microelectromechanical system (MEMS) filters with low cost, high performance, and compact size are introduced. The four-channel switched filters operating in the frequency range of 11-20 GHz have been developed using MEMS technologies and four five-pole edge-coupled bandpass filters, which are modified from the traditional edge-coupled bandpass filter in the input and output feeders to achieve a better stopband performance. Microwave filters, MEMS circuits, and related packaging are investigated and demonstrated theoretically and experientially.