Electro Optical Terahertz Pulse Reflectometry — an innovative fault isolation tool

Electro Optical Terahertz Pulse Reflectometry (EOTPR), an innovative time domain reflectometry (TDR) system, has been successfully developed. This is the first system that applies terahertz technology to time domain reflectometry. The system has achieved 10 um resolution, 5.7ps rise time, 94dB signal/noise ratio and 150 mm testing range and it has been successfully integrated into fault isolation and failure analysis process flow.