A Low Noise, High Resolution Silicon Temperature Sensor

High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The technique uses feedback to improve linearity and reduce noise. Data from test chips shows temperature resolution of 6.8 m°C. The chips were fabricated using a 1.75 um double poly, single metal modified CMOS process designed for this project.