Monolithic Infrared Sensor System with Programmable Readout Electronics

We report on a fully CMOS compatible infrared sensor with integrated signal amplification electronics. The IR sensor consists of 60 thermocouples of p
⁺
doped silicon and n-doped polysilicon electrically connected in series. Local SOI and an additional step of anisotropic backside etching have been used to achive a good thermal isolation between the hot and the cold junctions of the sensor. The signal amplification electronics has been realized using fully differential switched capacitor design techniques manufactured in a 2μm n-well CMOS-technology